发明名称 Drawing apparatus and drawing method
摘要 A drawing apparatus, for forming a desired drawing pattern by drawing the pattern directly on a drawing target surface using a drawing engine equipped with a plurality of drawing devices arranged along a direction of relative movement of the drawing target surface, the drawing engine being designed so that the design spacing of the thus arranged drawing devices is equal to a product of a unit pixel spacing in drawing data and an integer, comprises: correcting means for generating corrected drawing data by correcting the drawing data based on the difference between the design spacing and the actual spacing of the drawing devices; and supplying means for supplying the drawing engine with the corrected drawing data just necessary for direct drawing to a drawing block that the drawing engine can draw at a time on the drawing target surface, each time the drawing target substrate moves in relative fashion by a distance corresponding to an actual pixel spacing that is obtained by dividing the actual spacing of the drawing devices by that integer.
申请公布号 US7266802(B2) 申请公布日期 2007.09.04
申请号 US20050191021 申请日期 2005.07.28
申请人 SHINKO ELECTRIC INDUSTRIES CO., LTD. 发明人 SEKIGAWA KAZUNARI
分类号 G06F17/50;B41J2/01;G03C5/00;G03F7/20;G06F19/00;G21G5/00;G21K5/00;H01L21/027;H05K3/00 主分类号 G06F17/50
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