| 摘要 |
A cleaning apparatus is provided to increase the number of scrub cleaning units mounted on a cleaning system by arranging a plurality of scrub cleaning units in a multistage manner. A substrate(W) is horizontally maintained by a spin chuck which rotates the substrate within the surface of the spin chuck. The surface of the substrate maintained by the spin chuck is cleaned by a plurality of brushes. The brush is maintained by a plurality of brush maintenance arms. The plurality of brush maintenance arms are respectively and independently scanned by a plurality of arm driving units. The plurality of arm driving units are controlled by a controller. At least one of the plurality of brush maintenance arms can pass another brush maintenance arm in a scan direction. The controller can control the plurality of arm driving unit so that the plurality of brush maintenance arms don't collide with each other.
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