| 摘要 |
A low inertia two axis torsional hinged device formed from a single piece of silicon. The two axis torsional hinged device uses a pair of diametrally charged permanent drive magnets to pivot a gimbals member of the assembly about first and second torsional hinges aligned along a first axis. A single drive magnet mounted at the center of the backside of an optical surface of the assembly pivots the optical surface about another pair of torsional hinges aligned along a second axis that is orthogonal to the first axis. The drive magnets mounted on the gimbals member are located on the first axis and the single drive magnet on the back side of the optical surface is mounted at the intersection of the first and second axis such that all three magnets are aligned along the first axis.
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