发明名称 MULTIPASS MULTIPHOTON ABSORPTION METHOD AND APPARATUS
摘要 A method of increasing the efficiency of a multiphoton absorption process and apparatus. The method includes: providing a photoreactive composition; providing a source of sufficient light for simultaneous absorption of at least two photons; exposing the photoreactive composition to at least one transit of light from the light source; and directing at least a portion of the first transit of the light back into the photoreactive composition using at least one optical element, wherein a plurality of photons not absorbed in at least one transit are used to expose the photoreactive composition in a subsequent transit.
申请公布号 KR100754813(B1) 申请公布日期 2007.09.04
申请号 KR20027017046 申请日期 2002.12.13
申请人 发明人
分类号 G03F7/028;G03F7/20;B29C67/00;H01L21/027 主分类号 G03F7/028
代理机构 代理人
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