发明名称 TEMPERATURE CONTROL DEVICE AND TEMPERATURE CONTROL METHOD
摘要 A heater (112) has a temperature characteristic equal to or similar to the temperature characteristic of an electronic part (2) to be tested by a test pattern. While keeping the heater (112) in contact with the electronic part to be tested, the electronic part is pushed against contact terminals (132a, 132b). In this state, the test pattern is transmitted to the electronic part to be tested and the heater power consumption is controlled so that the sum of the power consumption of the electronic part to be tested and the power consumption of the heater is a constant value.
申请公布号 KR20070086952(A) 申请公布日期 2007.08.27
申请号 KR20077015455 申请日期 2007.07.05
申请人 ADVANTEST CORP. 发明人 ANDO MASAKAZU;TAKAHASHI HIROYUKI;YAMASHITA TSUYOSHI;HASHIMOTO TAKASHI
分类号 H01L21/66;G01R31/319;H01L23/34;H01L35/00 主分类号 H01L21/66
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