HYDROGEN SEPARATION MEMBRANE, SPUTTERING TARGET FOR FORMING OF HYDROGEN SEPARATION MEMBRANE, AND PROCESS FOR PRODUCING THE SAME

摘要

A hydrogen separation membrane characterized by having a structure obtained by sintering of an atomized powder of <= 50 Vm average particle diameter whose composition is represented by the formula Nix MyZr100-x-y (wherein M = Nb and/or Ta, 25 <= x <= 40, and 25 <= y <= 40). The obtained hydrogen separation membrane does not need to use expensive Pd metal, and as a substitute for conventional high-cost bulk metal glass produced by quenching of molten metal, is free from problems of hydrogen separation membrane defects and composition heterogeneity. The hydrogen separation membrane has a homogeneous structure and is capable of efficiently separating hydrogen at low cost. Further, there are provided a sputtering target for forming of the hydrogen separation membrane and a process for producing the same.