发明名称 TUBULAR TARGET COMPRISING A CONNECTING LAYER THAT IS SITUATED BETWEEN THE TUBULAR TARGET AND THE TUBULAR SUPPORT
摘要 The invention relates to a tubular target comprising a cylindrical tubular support and at least one tubular target that is located on the outer surface of said support, a connecting layer being situated between the target and the support. The invention is characterised in that the connecting layer is electrically conductive and has a wetting degree of > 90 %.
申请公布号 KR20070086523(A) 申请公布日期 2007.08.27
申请号 KR20077014141 申请日期 2007.06.21
申请人 W.C. HERAEUS GMBH 发明人 SIMONS CHRISTOPH;SCHLOTT MARTIN;SCHULTHEIS MARKUS;WEIGERT MARTIN;GUSSECK LARS
分类号 C23C14/34;H01J37/34 主分类号 C23C14/34
代理机构 代理人
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