发明名称 |
METHODS AND APPARATUS FOR DOWNSTREAM DISSOCIATION OF GASES |
摘要 |
A method and apparatus for activating and dissociating gases involves generating an activated gas with a plasma located in a chamber. A downstream gas input is positioned relative to an output of the chamber to enable the activated gas to facilitate dissociation of a downstream gas introduced by the gas input, wherein the dissociated downstream gas does not substantially interact with an interior surface of the chamber.
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申请公布号 |
KR20070085588(A) |
申请公布日期 |
2007.08.27 |
申请号 |
KR20077012265 |
申请日期 |
2007.05.31 |
申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
HOLBER WILLIAM M.;CHEN XING |
分类号 |
B01J12/00;B01J19/08;C23C16/452;H01J37/32 |
主分类号 |
B01J12/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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