NON-CONTACT CONVEY DEVICE BY SUPERCONDUCTING MAGNETIC LEVITATION

摘要

There is provided a non-contact convey device (10) by superconductive magnetic levitation capable of stably conveying a convey object (11). The device (10) includes: a convey table (12) having a bottom where a plurality of permanent magnets (16-19) are arranged for conveying the convey object (11); convey guide means (13) having a superconductive body (20) arranged immediately below the respective permanent magnets (16-19) of the convey table; a distance sensor (21) arranged on the convey guide means for detecting a distance between the convey table (12) and the convey guide means (13); a vibration-damping coil (25) arranged on the convey guide means (13) for generating a magnetic field by electricity to damp vibration of the convey table (12); and a control unit (27) for detecting vibration of the convey table (12) and controlling current flowing into the vibration-damping coil (25). Thus, even if disturbance is caused to the convey object (11) conveyed in non-contact way by the superconductive magnetic levitation, the vibration is stopped within a short period of time.