发明名称 |
DEVICE PROCESSING SYSTEM, INFORMATION DISPLAY METHOD, PROGRAM, AND RECORDING MEDIUM |
摘要 |
<p>A support device installed in a device manufacturing factory collects data from a device processing device and analyzes an operation condition of the device processing device according to the collected data. The support device includes: a data collection condition setting unit (231) for setting a data collection condition used in the device processing device; a statistic processing condition setting unit (232) for setting a processing condition of the statistic processing performed on the collected data; and a graph display condition setting unit (233) for setting a display condition for displaying the collected data or the processing result of the statistic processing.</p> |
申请公布号 |
KR20070085213(A) |
申请公布日期 |
2007.08.27 |
申请号 |
KR20077004212 |
申请日期 |
2007.02.22 |
申请人 |
NIKON CORPORATION |
发明人 |
YASUKAWA KOJI;SUZUKI HIROYUKI |
分类号 |
H01L21/027;G03F7/20;H01L21/02;H01L21/66 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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