发明名称 DEVICE PROCESSING SYSTEM, INFORMATION DISPLAY METHOD, PROGRAM, AND RECORDING MEDIUM
摘要 <p>A support device installed in a device manufacturing factory collects data from a device processing device and analyzes an operation condition of the device processing device according to the collected data. The support device includes: a data collection condition setting unit (231) for setting a data collection condition used in the device processing device; a statistic processing condition setting unit (232) for setting a processing condition of the statistic processing performed on the collected data; and a graph display condition setting unit (233) for setting a display condition for displaying the collected data or the processing result of the statistic processing.</p>
申请公布号 KR20070085213(A) 申请公布日期 2007.08.27
申请号 KR20077004212 申请日期 2007.02.22
申请人 NIKON CORPORATION 发明人 YASUKAWA KOJI;SUZUKI HIROYUKI
分类号 H01L21/027;G03F7/20;H01L21/02;H01L21/66 主分类号 H01L21/027
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