发明名称 POLISHING PAD
摘要 Disclosed is a polishing pad which enables high-precision optical end point detection during polishing operation, while enabling to prevent slurry leakage from between a polishing region and a light-transmitting region even after long use. Specifically disclosed is a polishing pad which is provided with a water permeation-preventing layer (10) on one side of a polishing region (8) and a light-transmitting region (9). The light-transmitting region and the water permeation-preventing layer are formed integrally from a same material.
申请公布号 KR20070085545(A) 申请公布日期 2007.08.27
申请号 KR20077012140 申请日期 2005.12.08
申请人 TOYO TIRE & RUBBER CO., LTD. 发明人 OGAWA KAZUYUKI;SHIMOMURA TETSUO;KAZUNO ATSUSHI;NAKAI YOSHIYUKI;WATANABE MASAHIRO;YAMADA TAKATOSHI;NAKAMORI MASAHIKO
分类号 B24B37/20;H01L21/304 主分类号 B24B37/20
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