发明名称 |
PENTABORANE(9) STORAGE AND DELIVERY |
摘要 |
A fluid storage and dispensing system comprising a vessel for holding a pentaborane(9)-containing fluid at subatmospheric pressure. The fluid storage and dispensing system may be communicatively connected to a semiconductor or liquid crystal display manufacturing facility, whereby the pentaborane(9) is used as a substitute for commercially available boron hydride compounds such as diborane.
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申请公布号 |
KR20070086873(A) |
申请公布日期 |
2007.08.27 |
申请号 |
KR20077015110 |
申请日期 |
2007.06.29 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS INC. |
发明人 |
OLANDER KARL W.;ARNO JOSE I. |
分类号 |
C23C16/00;B67D99/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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