发明名称 REACTOR DESIGN TO REDUCE PARTICLE DEPOSITION DURING PROCESS ABATEMENT
摘要 Systems and methods are provided for controlled combustion and decomposition of gaseous pollutants while reducing deposition of unwanted reaction products from within the treatment systems. Exemplary systems include a novel thermal reaction chamber design having stacked porous ceramic rings through which fluid, e.g., gases, may be directed to form a boundary layer along the interior wall of the thermal reaction chamber, thereby reducing particulate matter buildup thereon. The systems may further include the introduction of fluids from the center pilot jet to alter the aerodynamics of the interior of the thermal reaction chamber.
申请公布号 KR20070086017(A) 申请公布日期 2007.08.27
申请号 KR20077013112 申请日期 2007.06.11
申请人 APPLIED MATERIALS INC. 发明人 CHIU HO MAN RODNEY;CLARK DANIEL O.;CRAWFORD SHAUN W.;JUNG, JAY J.;TODD LEONARD B.;VERMEULEN ROBBERT
分类号 F23G7/06;F23J9/00;F23M5/08 主分类号 F23G7/06
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