| 摘要 |
A movement guiding device having a damping structure different from a conventional damping structure, a table device, and a damping method for the movement guiding device. The movement guiding device comprises a rail member (1) having a rolling element rolling part (1a), a movement member (2) having a loaded rolling element rolling part (2a) facing the rolling element rolling part (1a) and capable of performing a linear or curve movement relative to the rail member (1), and a plurality of rolling elements (3) interposed between the rolling element rolling part (1a) of the rail member (1) and the rolling element rolling part (2a) of the movement member (2). The layer of an oil in contact with the rail member (1) and the movement member (2) is filled in a clearance (16) between the rail member (1) and the movement member (2). A braking force in proportion to a speed is provided to the movement member (2) or the rail member (1) by utilizing the viscosity resistance of the oil.
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