DEVICE FOR NANOSTRUCTURE MANUFACTURING

摘要

A device for nanostructure manufacturing relates to microelectronic technique and may be used in technological processes at nanostructure manufacturing. The device consists of a control parameter unit with its input being the device input; the control parameter unit output is connected with input of a delivery unit of a pointed structure. Output of a pointed structure delivery unit is linked with input of a unit for tunnel current control. Input-output of the unit for tunnel current control is connected with input-output of the parameter control unit. The device is also includes a technological controller unit, input-output of which is connected with input-output of parameter control unit, output is connected with input of the pointed structure delivery unit. The second output of the technological controller unit is output of the device. The pointed structure delivery unit is implemented in the form of matrix comprising 8 pointed modules. The technical result is deposition of the necessary nanostructures with corresponding parameters and industrial realized productivity, that allows substantially increasing functional capabilities of the device.