PROCESSING METHOD, PROCESSING APPARATUS, AND FINE STRUCTURE PRODUCED BY THE METHOD

摘要

A processing method by which a high-accuracy fine structure can be easily formed and which attains a low production cost. The method is characterized by comprising a step in which a thin film (1) made of a resin is set between a die (2) and a counter base (3); a step in which the thin resin film (1) between the die (2) and the counter base (3) is heated to a temperature not lower than the fluidization initiation temperature; and a step in which the thin resin film (1) having a temperature not lower than the fluidization initiation temperature is pressed between the die (2) and the counter base (3) to form through-holes therein.