| 摘要 |
<p>Even if an object to be conveyed is a transparent material, a conveying/inspecting apparatus capable of performing inspection of defect of the object while it is conveyed without contact. The conveying/inspecting apparatus has a conveying apparatus (2) for conveying without contact a thin member (5) by controlling a voltage applied to an electrode surface, and has a defect inspecting apparatus (3) for inspecting defect of the thin member (5) during the conveyance. In the conveying apparatus (2) is provided, at a part of the electrode surface, a light beam transmitting section (cutout section) (15) for transmitting a light beam. By use of the light beam transmitting section (15), the defect inspecting apparatus (3) can perform inspection of defect of an object while it is conveyed without contact even if the object is a transparent material.</p> |
