| 摘要 |
<p>A method of housing a large pellicle, including housing in a case composed of a tray and a lid a large pellicle of >= 1000 cm2 area composed of a frame, a pellicle film bonded to an upper edge surface of the frame, an adhesive material applied to a lower edge surface of the frame and a protective film stuck to the lower surface of the frame so as to protect the adhesive material, characterized in that part or the whole of the peripheral edge of the protective film of the large pellicle is protruded outward so as to provide a hold margin, and that the hold margin is fixed to the tray by means of adhesive tape to thereby accomplish housing of the large pellicle in the case.</p> |
