| 摘要 |
A mechanical vibrator which defines the starting point of a cantilever at the front end of a base and can determine the length of the cantilever without depending on a positioning accuracy and an etching amount, and a production method of the mechanical vibrator. The mechanical vibrator, produced by processing a wafer, comprises a base (101) formed with an SOI wafer support base and a structure (102) formed from an SOI-wafer silicon thin film and becoming a cantilever horizontally projecting from the base (101), wherein a part of a buried oxide film (103) between the base (101) and the structure (102) becoming a cantilever is removed, and a cantilever (104) starting at the tip end (105) of the base (101) and directly joined with the structure (102) becoming a cantilever is provided to at least a part including the tip end (105) of the base (101) from which the buried oxide film (103) has been removed. |
