发明名称 METHOD OF OPERATING A RESISTIVE HEAT-LOSS PRESSURE SENSOR
摘要 In a resistively heated heat-loss pressure gauge, electrical current is switched between a sensing element and a compensating element at different duty cycles. As a result, the sensing element is heated relative to the compensating element. A fixed resistance is placed in series with at least the compensating element. The current source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the fixed resistive element.
申请公布号 KR20070085218(A) 申请公布日期 2007.08.27
申请号 KR20077004724 申请日期 2007.02.27
申请人 BROOKS AUTOMATION, INC. 发明人 BORENSTEIN MICHAEL D.;ARNOLD PAUL C.
分类号 G01L21/12 主分类号 G01L21/12
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