| 摘要 |
A moving mechanism of a first mask clamp (20) is a mechanism for moving the first mask clamp (20) in a film forming apparatus for forming an organic EL element. The moving mechanism is provided with a chuck (16) which is arranged to face a vapor source (14) of an organic material (12) and places a mask (34) over a substrate; a first mask clamp (20) which has a leading edge section (20a) formed in a hook-shape and holds the mask (34) placed over the chuck (16) by the leading edge section (20a); and an extending/retracting means (22) for moving the substrate clamp (18). The extending/retracting means (22) is configured by arranging a first extending/retracting means (24) on an apparatus main body (11), connecting a first rod, which performs extending/extracting operation, to a board member (23), arranging a second extending/retracting means (26) on the board member (23), and connecting or bringing a second rod, which performs extending/retracting operation, to or into contact with an base end section of the substrate clamp (18).
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