| 摘要 |
A carrying means (28) for carrying substrates in a standing condition, a processing part (4) for performing a prescribed process to the substrates carried in the standing condition by the carrying means, a loader part (2) for loading the substrates on the processing part, and an unloader part (3) for receiving the substrates processed by the processing part are provided. At least the loader part or the unloader part is provided with a loader (6), which has a supporting plane (5) arranged rotatably to have the substrates supplied and placed upon, and a motor (11) which rotary drives the loader and positions its supporting plane at a prescribed inclination angle.
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