| 摘要 |
<p>A structure for connecting end parts to each other capable of reducing vibration by a simple apparatus, capable of isolating electrical noise, and having the degree of freedom in mounting attitude and a vacuum system to which the structure is applied. A recessed part (206) formed in a rectangular shape in cross section and opening upward is formed in a flange projected part (202) annularly around an intake port (101). An O-ring (207) is disposed in the recessed part (206). The O-ring (207) is extruded upward from the recessed part (206). A plurality of through holes (209) allowing bolts (205) to pass therethrough are circumferentially formed around a pump flange (201). Rubber cylindrical elastic members (211) are disposed in the through holes (209). Also, spacer collars (213) having cylindrical body portions (213a) and disk-like flange parts (213b) are inserted to the insides of the cylindrical elastic bodies (211).</p> |
