| 摘要 |
<p>A substrate carrying device and a substrate carrying method for carrying substrates such as reticles and an exposure device. The substrate carrying device capable of securely sucking the substrates onto the lower surface of a chuck comprises a movable stage having the chuck with a substrate sucking face facing downward and movable in the horizontal direction and a fixed blind disposed on the lower side of the movable stage. The movable stage is characterized in that it is horizontally moved to a position out of the fixed blind for attaching and detaching the substrates. Also, the substrate carrying device is characterized by comprising a lifting means having a lifting table movable to a position on the lower side of the movable stage within the movable range of the movable stage and a carrying means having a carrying arm for carrying the substrates to the lifting means.</p> |
