| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-quality color filter and its manufacturing method leaving almost no residues. <P>SOLUTION: This color filter manufacturing method has the step of patterning on the resin film 200 formed on a transparent substrate 100 by using a laser ablation unit 4, and the step of cleaning the patterned resin film 200 by using a cleaning unit 6. The cleaning step is started within 60 seconds after the resin film 200 has been patterned with the laser ablation unit 4 (after the end of irradiation with the laser beam). During the cleaning step, the cleaning liquid is jetted on the transparent substrate 100 at the pressure of 2-35 MPa, and the average diameter of the droplets of the cleaning solution is made 5-20 μm. <P>COPYRIGHT: (C)2007,JPO&INPIT |
