| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly conductive, multi-tray film precursor evaporation system (50, 300) coupled to a highly conductive vapor delivery system (40) for improving deposition rate by increasing exposed surface area of a film precursor (350). SOLUTION: The multi-tray film precursor evaporation system includes one or more trays (330, 340). Each tray is configured to support and retain the film precursor in, for example, a solid powder form or a solid tablet form. Each tray is optionally configured to provide a highly conductive flow of carrier gas over the film precursor while the film precursor is heated. For example, the carrier gas flows inward over the film precursor and vertically upward through a flow channel within the stackable trays and exits through an outlet (322) in the solid precursor evaporation system (300). COPYRIGHT: (C)2007,JPO&INPIT
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