| 摘要 |
PROBLEM TO BE SOLVED: To measure the height of a measurement point at a high speed, with the measurement point set on a measuring object. SOLUTION: This minute height measuring instrument is equipped with a measurement point selection means 3 with a plurality of micromirrors arrayed in a matrix form and selected to be severally inclined so that light beams from a light source 2 reflect in the direction of the measuring object 1; a high-order refracted light processing means 4 for processing high-order refracted beams included in the light beam reflected toward the measuring object 1; a light detection means 6 for detecting the light beam returning by being reflected at the measurement point set on the measuring object 1 via a selected micromirror; a displacement means 7 for displacing the measuring object 1 in the optical-axis direction relatively to an objective lens 5 to detect and output its displacement amount; and a control means 8 for finding a displacement amount, showing the maximum luminance value as the height of the measuring object 1 at the measuring point from data, on the luminance of the light detected by the detection means 6 and on the displacement amount inputted from the displacement means 7. COPYRIGHT: (C)2007,JPO&INPIT
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