| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid-repellent region measurement method capable of easily and high-accurately measuring a liquid-repellent region in a nozzle opening in a short time and reducing costs, and a liquid-repellent region measurement device. SOLUTION: A liquid-repellent region measurement method includes a plurality of nozzle openings 21 for injecting liquid and a liquid-repellent region with a liquid-repellent film 30 in the inner surface at the opening side of the nozzle opening 21 which is opened at one surface side of a nozzle plate 20, in which the depth of the liquid-repellent region of the nozzle plate 20 joined to a flow passage forming substrate, in which a flow passage communicating to the nozzle opening 21, is measured.In the method, inspection liquid 10 is fed at a predetermined pressure from the opening side which is opened at other surface of the nozzle plate 20 of the nozzle opening 21; the inspection liquid 10 is filled in a non-liquid repellent region in which the liquid-repellent film of the nozzle opening 21 is not provided; and the depth from the other surface of the nozzle plate 20 to the inspection liquid 100 is measured. COPYRIGHT: (C)2007,JPO&INPIT |
