NANO-SIZED ULTRATHIN FILM DIELECTRIC, PROCESS FOR PRODUCING THE SAME AND NANO-SIZED ULTRATHIN FILM DIELECTRIC DEVICE

摘要

A nano-sized ultrathin film dielectric composed mainly of either a single nanosheet of titanium oxide obtained by peeling layer titanium oxide or a laminate thereof. Thus, there can be accomplished low-temperature production of a dielectric device that simultaneously realizes excellent insulation performance and high dielectric constant in nanoregions and reduces influences of substrate interface deterioration and composition departure.