| 摘要 |
A transfer apparatus is provided to reduce repulsive force generated from static electricity between a transfer arm and a wafer by using a material having high static electricity discharge characteristic coated on the transfer arm. The transfer apparatus transfers a wafer(3) by using a transfer arm(2) of an ungrounded state. The transfer arm is coated with a material having high static electricity discharge characteristic. The transfer arm is coated with a material positioned at a negative pole in a triboelectric series upon comparing with a material configuring a base material of the transfer arm. The transfer arm includes a base material made of metal and is coated with a fluorinated graphite material. The transfer arm includes a supporting section extended along a surface of the transfer arm. A wafer is arranged on the supporting section. A thickness of the supporting section is progressively decreased toward a front end. |
