| 摘要 |
PROBLEM TO BE SOLVED: To provide a bipolar electrostatic chuck capable of developing a required attracting force even when contaminant, such as moisture, organic matters or the like, is adhered to the surface of the electrostatic chuck serving as an attracting surface. SOLUTION: The bipolar electrostatic chuck 1 is equipped with a base mount 4, a pair of positive and negative electrodes 2a, 2b formed on the upper surface of the base mount 4, and an insulating layer 3 formed on the base mount 4 so as to cover the electrodes 2a, 2b. In such a bipolar electrostatic chuck 1, a groove 6 whose depth from the surface of the insulating layer is larger than the depth of the position of the pair of positive and negative electrodes 2a, 2b, is formed so as to part between the pair of positive and negative electrodes 2a, 2b. COPYRIGHT: (C)2007,JPO&INPIT |
