| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating stage, designed such that a permeability decrease during supply of power under heat is restrained, satisfactory conductivity is retained, and an electric field generated during the supply of power to the transparent conductive body under heat is reduced. SOLUTION: The heating stage 1 includes a glass substrate 2 and the transparent conductive body 3, disposed on one side of the glass substrate. In the heating stage, the transparent conductive body is formed, from at least ITO (tin-added indium oxide), and the thickness of the film is equal to or greater than 400 nm, but equal to or less than 1,200 nm. COPYRIGHT: (C)2007,JPO&INPIT |
