| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample stand for a scanning electron microscope and its angle adjusting method whereby the angle of a sample can be easily and accurately adjusted. SOLUTION: This sample stand 25 is composed of a sample pasting plate 30 for pasting the sample, three angle adjusting screws 31 to support the sample pasting plate 30 at three points so as to freely tilt it, a body 33 in which the angle adjusting screws 31 are threaded, and a pedestal 37 connected to a connecting screw 32 integrally formed in the body 33. The threaded amount of the angle adjusting screw 31 regularly changes in response to its rotation, and a user can easily and accurately adjust the angle of the sample by rotationally operating each angle adjusting screw 31. The user adjusts the angle while monitoring the pedestal 25 from the side direction of the sample by a stereomicroscope. Grid lines are displayed in parallel at regular intervals in the stereomicroscope, and the user adjusts the angle while referring to the grid lines. COPYRIGHT: (C)2007,JPO&INPIT
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