TRANSFER MOLD AND ALIGNMENT METHOD OF TRANSFER MOLD

摘要

PROBLEM TO BE SOLVED: To achieve the reduction of the manufacturing cost of a transfer mold and to enhance the precision of alignment. SOLUTION: The transfer mold F1 for transferring the curable paste of a partition wall forming material to a substrate P used for forming a partition wall is formed by a dicing blade B for processing the transfer mold F1 to form a structure for holding the curable paste and equipped with a truncated pyramid-shaped alignment mark M10 surrounded by inclined side surfaces M10a which forms shadow by reflected or transmitted light of irradiated light. COPYRIGHT: (C)2007,JPO&INPIT