| 摘要 |
PROBLEM TO BE SOLVED: To disclose a vacuum-driven gas gage proximity sensor for sensing a difference between a reference surface standoff and a measuring surface standoff. SOLUTION: In this vacuum-driven gas gage proximity sensor, a gas flow passed through the proximity sensor is reversed using vacuum, and gas is made to flow into an inside via a measuring nozzle and a reference nozzle across over the measuring standoff and the reference standoff. Regulation-finished peripheral gases sucked by the reference nozzle and the measuring nozzle flow through a reference channel and a measuring channel, and the reference channel and the measuring channel are connected at a junction point to be formed into a single channel. The single channel is connected to the vacuum used to evacuate the regulation-finished peripheral gases through the proximity sensor. A bridge channel connects the reference channel to the measuring channel. A mass flow sensor along the bridge channel monitors a flow rate to detect the measuring standoff used for starting a control operation. COPYRIGHT: (C)2007,JPO&INPIT
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