| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processor and a sample conveyance method in which sample processing efficiency of the entire vacuum processor is enhanced in the operation where sample processing is carried out in a plurality of processing chambers in parallel. SOLUTION: In the vacuum processor comprising a plurality of cassettes 1-3 for containing a sample, a means for conveying the sample, a plurality of vacuum processing chambers 8-11 for processing the sample sheet by sheet, an exhaust means for evacuating the vacuum processing chamber, a load chamber 6 and an unload chamber 12 communicating with a vacuum conveyance chamber, and a device control means 15 for controlling conveyance and processing of the sample, the device control means measures the conveyance time of the sample and the processing time in the processing chamber and then determines the timing for taking out the sample from the plurality of cassettes based on the measured time. COPYRIGHT: (C)2007,JPO&INPIT
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