| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL element having an organic EL layer constructed of a transparent conductive layer, a negative electrode layer opposed to the transparent conductive film, and one or a plurality of functional layers including an organic luminous layer interposed by both electrodes on a transparent substrate, in which, even when the organic EL layer is formed by a wet coating method, solvent is removed by a simple method and even if the solvent remains, deterioration of the characteristics of the EL layer does not occur and the high performance organic EL element can be manufactured. SOLUTION: This is the manufacturing method of the organic EL element in which at least one layer of functional layers is arranged by a wet process method at the upper part of the transparent conductive layer and the functional layer is dried by a process in which the atmosphere space where the functional layer is placed is replaced by a dried inert gas and a process in which it is again replaced by the dried inert gas. After the functional layer is placed in a reduced pressure space, the functional layer is heated while the dried inert gas is filled in the space, and the atmosphere space is replaced by the heated inert gas. COPYRIGHT: (C)2007,JPO&INPIT
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