| 摘要 |
PROBLEM TO BE SOLVED: To correct curvature of a raw bar for small magnetic head to achieve exposure treatment of a resist pattern for ABS for each magnetic head in one exposure treatment. SOLUTION: A plurality of bonding heads for holding the raw bar are provided, and each bonding head is driven in a predetermined direction in the same plane depending on a curvature condition, and each bonding head is actuated independently, so that curvature of the raw bar is corrected. COPYRIGHT: (C)2007,JPO&INPIT
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