| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for acquiring a film thickness calibration curve for film thickness measurements and capable of accurately and easily acquiring calibration curve data to be used to measure film thickness through the use of an ultrasonic probe. SOLUTION: The method for acquiring a calibration curve used to measure the film thickness of a film formation part formed between a first surface and a second surface comprises a step for receiving echo-height signals, reflected waves from the film formation part, each on different film thicknesses by the ultrasonic probe; a step for computing a ratio of echo heights acquired by normalizing the echo-height signals; a step for computing the percentage change of the ratio of echo heights between a previously set first film thickness value and a previously set second film thickness value; and a step for acquiring the relation between the percentage change and the film thickness value as the calibration curve. COPYRIGHT: (C)2007,JPO&INPIT
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