| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting device for the thickness of an inspected part capable of obtaining an accurate residual thickness measurement result even when the inspected part hardly transmits visible light by utilizing the transmitting characteristic of X-rays. SOLUTION: The inspecting device comprises an X-ray source 2 for radiating the X-rays 3 to be radiated to a specimen 6, an X-ray brightness measuring instrument 5 for measuring the brightness of the X-rays that is arranged on the opposite side of the X-ray source while an inspection space 8 for radiating the X-rays to the specimen is disposed, a transferring means 7 for passing the specimen in the inspection space at a predetermined speed, and a controller 12 that controls the transferring means, X-ray brightness measuring instrument, and X-ray source, calculates the thickness of the inspected part based on the measured brightness of the X-rays, and determines whether the thickness of the inspected part is within a desired range. COPYRIGHT: (C)2007,JPO&INPIT
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