| 摘要 |
PROBLEM TO BE SOLVED: To perform heat treatment in a setter-less system while actualizing inexpensive, early and accurate detection of the occurrence of cracking in a treated object in a furnace. SOLUTION: Part of each of a plurality of heat resistant glasses 32 arranged under a carrying roller 2 along a carrying passage is exposed as an exposed part 5 to the outside of the furnace, and a vibration sensor 4 is arranged on the exposed part 5. In accordance with a detection signal from the vibration sensor 4, the fall of part of a carried object on the heat resistant glass 32 due to the occurrence of cracking is detected. At this time, the rotation of the carrying roller 2 is stopped. COPYRIGHT: (C)2007,JPO&INPIT
|
