| 摘要 |
<p>The microsystem (1) is made in a planar substrate and includes two oscillating masses (2a, 2b) that are connected to the substrate via suspension springs (3a, 3b). The oscillating masses (2a, 2b) are coupled by a rigid coupling bar (11) so as to make said oscillating masses (2a, 2b) move in phase opposition when they are excited in a predetermined excitation direction (Ox). The coupling bar (11) is connected to intermediate zones of the corresponding suspension springs (3a, 3b), which are located on opposite sides (7a, 7b) of the oscillating masses (2a, 2b). The intermediate zones are located between a first end of the suspension springs (3a, 3b), which is fastened to the corresponding oscillating mass (2a, 2b), and a second end of the suspension springs (3a, 3b), which is fastened to the substrate by a corresponding anchoring point (4a, 4b).</p> |
