| 摘要 |
An electrodynamic cantilever sensor is provided to reduce manufacturing costs by adding a thin film electrode at the existing cantilever and simplifying the structure. An electrodynamic cantilever sensor includes a cantilever(1), a gold thin film(2), an opposite electrode(4), a laser illumination device(6), a detector(7), and a power generating device(8). The cantilever is capable of applying an electric field. The laser illumination device observes the characteristic of curvature of the cantilever. The electric field is generated by applying power to the thin film electrode installed on the cantilever. The thin film electrode is installed at least on one surface of the cantilever. The thin film electrode is made from gold. The detector analyzes the observed behavior from the laser illumination device.
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