发明名称 PIEZOELECTRIC VIBRATION CHIP AND PIEZOELECTRIC DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration chip which hardly causes spurious due to a bending mode in a vibration part and can enhance the figure of merit in the case of configuring a vibrator. <P>SOLUTION: The piezoelectric vibration chip 10, producing thickness sliding vibration as principal vibration, includes: the vibration part 12 on the principal surface of which are formed with exciting electrodes 18a, 18b for exciting the thickness sliding vibration; a frame part 14 arranged at an outer circumferential side of the vibration part 12 via a through groove 16; and a support part 13 connecting the vibration part 12 to the frame part 14, wherein it is characterized in that an elliptic shape is adopted for the shape of the vibration part 12 and the exciting electrodes 18a, 18b. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007214941(A) 申请公布日期 2007.08.23
申请号 JP20060033323 申请日期 2006.02.10
申请人 EPSON TOYOCOM CORP 发明人 ISHII OSAMU
分类号 H03H9/19;H01L41/09;H01L41/18;H01L41/22;H01L41/23;H01L41/29 主分类号 H03H9/19
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