发明名称 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE, AND METHOD FOR FABRICATING CIRCUIT BOARD
摘要 PROBLEM TO BE SOLVED: To increase clearance between the edge ends of a semiconductor chip and lead terminal of a tape substrate, while suppressing the hight of a bump electrode. SOLUTION: A bonding stage 16 is configured so that the edge ends 16a of the bonding stage 16 is right at the position of the edge ends 35a of the semiconductor chip 35. The semiconductor chip 35 is mounted on the tape substrate 31, while sucking the tape substrate 31 through a suction groove 17. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007214601(A) 申请公布日期 2007.08.23
申请号 JP20070138805 申请日期 2007.05.25
申请人 SEIKO EPSON CORP 发明人 TAKANO MICHIYOSHI
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址