| 摘要 |
Provided is a method for manufacturing a magnetic recording medium that has a concavo-convex patterned recording layer, sufficient flatness, and excellent recording/reproducing properties. A filling material is deposited over a workpiece including a substrate; a recording layer formed over the substrate in a predetermined concavo-convex pattern of which convex portions are recording elements; and a detection material formed over the recording elements. Process gas is irradiated to the surface to remove a portion of the filling material and the detection material to flatten the surface. An element contained in the detection material removed and flying off is detected on the basis of its atomic mass number. The irradiation of the process gas is then stopped according to the detection result. The detection material contains an element selected from the group consisting of aluminum, yttrium, zirconium, niobium, rhodium, silver, terbium, tantalum, gold, bismuth, titanium, indium, and tungsten.
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