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发明名称
METHOD FOR FORMING INSULATING FILM IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100751659(B1)
申请公布日期
2007.08.23
申请号
KR20057017077
申请日期
2005.09.13
申请人
发明人
分类号
H01L21/316;H01L27/04;H01L21/28;H01L21/3105;H01L21/314;H01L21/336;H01L21/822;H01L29/51;H01L29/78;H01L29/786
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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