| 摘要 |
PROBLEM TO BE SOLVED: To inspect an error of sticking position of a polarizing plate which is stuck to a TFT array substrate and a color filter substrate. SOLUTION: An alignment mark AM formed on the TFT array substrate 10 is recognized, an X-axis and a Y-axis are preset within a vision of a camera 50 and the alignment mark AM is recognized. Further, on the basis of the recognized alignment mark AM as a reference, an X-directional search area XSA of the prescribed range in the X-direction where it is predicted that there is an edge line and a Y-directional search area YSA of the prescribed range in the Y-direction are preset. The X-directional search area XSA and the Y-directional search area YSA are scanned from the inside toward the outside and the edge line is detected in accordance with the change of light quantity. By making an intersecting point of the edge line an apex of the polarizing plate 20, the quantity of the error with the alignment mark AM is output. COPYRIGHT: (C)2007,JPO&INPIT
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