| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS device in which incident light is stably modulated and to provide a method of manufacturing MEMS device by which an MEMS structure body is manufactured by using a CMOS manufacturing process. SOLUTION: In the MEMS device 1, an MEMS structure body area 3 and a semiconductor area 2 are provided on a silicon substrate 10, wherein the MEMS structure body is composed by disposing a lower electrode 51, a movable electrode 61 and an upper electrode 71 in a layered state while separated with equal spaces, the upper electrode 71 has an open part 72 through which incident light passes, the movable electrode 61 has a reflection face 62 which reflects the incident light from the open part 72, the reflected light passes through the open part 72 in a first state where the movable electrode 61 is located close to the upper electrode 71, and the reflected light does not pass through the open part 72 in a second state where the movable electrode 61 is located close to the lower electrode 51, and the incident light is modulated by the first or the second state. COPYRIGHT: (C)2007,JPO&INPIT
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