| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring the concentration of fluorine gas and capable of measuring the concentration of fluorine gas of various types of sample gas with high sensitivity, by substantially improving the sensitivity of a commercially available fluorine gas densitometer. SOLUTION: The fluorine gas densitometer is provided with a reactant which generates selective luminous reaction, when it is in contact with fluorine gas, and a gas substantially not containing fluorine nor moisture is brought into contact with the reactant of the fluorine gas densitometer to measure the concentration of fluorine gas with moisture content of the reactant reduced from an unused state. After the reactant is modified, in such a way as to make a specific absorption band disappear and another absorption band appear, the concentration of fluorine gas is measured. COPYRIGHT: (C)2007,JPO&INPIT
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